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Thermal sensor based on si single crystal implanted with different parties P⁺ and B⁺ ions

I. R. Bekpulatov, Sh. K. Saliyeva, Z. R. Saidakhmedova and D. T. Rasulova

E3S Web of Conf., 401 (2023) 04019

DOI: https://doi.org/10.1051/e3sconf/202340104019

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