E3S Web of Conferences

Field measurement analyses and improvement simulation of airflow parallelism in a wafer-griding cleanroom

Indra Permana, Alya Penta Agharid and Fujen Wang

E3S Web Conf., 672 (2025) 02015

Published online: 05 December 2025

DOI: 10.1051/e3sconf/202567202015

Indra Permana

Alya Penta Agharid

Fujen Wang

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