A novel model and design of a MEMS Stirling cooler for local refrigerationSylvie Bégot, Muluken GETIE, Alpha Diallo, François Lanzetta, Magali Barthès and Michel de LabachelerieE3S Web Conf., 313 (2021) 10001DOI: https://doi.org/10.1051/e3sconf/202131310001