Obtaining higher manganese silicide films with high thermoelectric propertiesI.R. Bekpulatov, D.S. Shomukhammedova, D.M. Shukurova and B.V. IbragimovaE3S Web of Conf., 365 (2023) 05015DOI: https://doi.org/10.1051/e3sconf/202336505015