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Changes in the electronic structure of the Si surface as a result of ion implantation

S.B. Donaev, U.A. Ziyamukhamedova, M. Kenjaeva, G.M. Shirinov, A.M. Rakhimov and A.A. Abduvayitov

E3S Web Conf., 383 (2023) 04040

DOI: https://doi.org/10.1051/e3sconf/202338304040

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