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Architecture of composite multilayer semiconductor nanostructures

N. A. Vetrova, E. V. Kuimov, S. A. Meshkov, M. O. Makeev, V. Yu. Sinyakin and V. D. Shasurin

E3S Web of Conf., 413 (2023) 02026

DOI: https://doi.org/10.1051/e3sconf/202341302026

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