Ion sputtering as methods for generation of cluster particlesSh.T. Khozhiev, S.E. Maksimov, Sh.K. Kuchkanov, B.B. Gaibnazarov, I.A. Yuldoshev, I.O. Kosimov and Sh.Yu. MenglievaE3S Web Conf., 461 (2023) 01065DOI: https://doi.org/10.1051/e3sconf/202346101065
