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Analytical Review on Enhancing Sustainability in microsystems by Integrating MEMS for Compact Design

Sarvesh Vyas, Ali K. Alhussainy, Y. Kamala Raju, Manjunatha, Arun Pratap Srivastava, Alok Jain and T. Vijetha

E3S Web Conf., 552 (2024) 01108

DOI: https://doi.org/10.1051/e3sconf/202455201108

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