Etching of a fluoropolymer coating synthesized by the hot wire chemical vapor deposition method in a low-frequency induction discharge plasmaAnna Petrova, Vadim Pinaev, Alexey Safonov and Sergey KhmelE3S Web Conf., 578 (2024) 01028DOI: https://doi.org/10.1051/e3sconf/202457801028