High Power Self-Aligned, Trench-Implanted 4H-SiC JFETsK. Vamvoukakis, A. Stavrinidis, D. Stefanakis, G. Konstantinidis, M. Kayambaki and K. ZekentesE3S Web Conf., 16 (2017) 12001DOI: https://doi.org/10.1051/e3sconf/20171612001