Epitaxial AIN/AIN bimorph piezocantilevers for geothermal monitoringE.A. Panyutin, S.S. Sharofidinov, A.V. Kremleva and L.A. SokuraE3S Web Conf., 592 (2024) 05005DOI: https://doi.org/10.1051/e3sconf/202459205005
