E3S Web of Conferences

Improvement of thermal stability of Ta-N film in Cu metallization by a Zr-Si interlayer

Yannan Zhai, Zhaoxin Wang, Hui Zhang, Ling Gao and Changhong Ding

E3S Web Conf., 271 (2021) 04015

Published online: 15 June 2021

DOI: 10.1051/e3sconf/202127104015

Yannan Zhai

Zhaoxin Wang

Hui Zhang

Ling Gao

Changhong Ding

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