A novel model and design of a MEMS Stirling cooler for local refrigeration Sylvie Bégot, Muluken GETIE, Alpha Diallo, François Lanzetta, Magali Barthès and Michel de Labachelerie E3S Web Conf., 313 (2021) 10001 Published online: 22 October 2021 DOI: 10.1051/e3sconf/202131310001