Study on the thermal decomposition reaction process and kinetics of SF6 and tungsten Mengyuan Xu, Houhua Lv, Yunfang Liu, Ren Yang, Yanhua Han, Liuyu Xu, Xu Li, Jiuhong Li, Xiao Zhang, Yajun Jian and Weiqiang Zhang E3S Web Conf., 375 (2023) 03002 Published online: 27 March 2023 DOI: 10.1051/e3sconf/202337503002