E3S Web of Conferences

Architecture of composite multilayer semiconductor nanostructures

N. A. Vetrova, E. V. Kuimov, S. A. Meshkov, M. O. Makeev, V. Yu. Sinyakin and V. D. Shasurin

E3S Web Conf., 413 (2023) 02026

Published online: 11 August 2023

DOI: 10.1051/e3sconf/202341302026

N. A. Vetrova

E. V. Kuimov

S. A. Meshkov

M. O. Makeev

V. Yu. Sinyakin

V. D. Shasurin

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