E3S Web of Conferences

Etching of a fluoropolymer coating synthesized by the hot wire chemical vapor deposition method in a low-frequency induction discharge plasma

Anna Petrova, Vadim Pinaev, Alexey Safonov and Sergey Khmel

E3S Web Conf., 578 (2024) 01028

Published online: 14 October 2024

DOI: 10.1051/e3sconf/202457801028

Anna Petrova

Vadim Pinaev

Alexey Safonov

Sergey Khmel

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