E3S Web of Conferences

Design and preparation of 222nm deep ultraviolet thin films

Jiawang Lou, Xinyang Li, Zhuo Liu, Yan Song, Yibo Wang, Jin Yang and Meixuan Li

E3S Web Conf., 625 (2025) 03006

Published online: 17 April 2025

DOI: 10.1051/e3sconf/202562503006

Jiawang Lou

Xinyang Li

Zhuo Liu

Yan Song

Yibo Wang

Jin Yang

Meixuan Li

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