E3S Web of Conferences

Epitaxial AIN/AIN bimorph piezocantilevers for geothermal monitoring

E.A. Panyutin, S.S. Sharofidinov, A.V. Kremleva and L.A. Sokura

E3S Web Conf., 592 (2024) 05005

Published online: 20 November 2024

DOI: 10.1051/e3sconf/202459205005

E.A. Panyutin

S.S. Sharofidinov

A.V. Kremleva

L.A. Sokura

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)