| Issue |
E3S Web Conf.
Volume 206, 2020
2020 2nd International Conference on Geoscience and Environmental Chemistry (ICGEC 2020)
|
|
|---|---|---|
| Article Number | 02022 | |
| Number of page(s) | 6 | |
| Section | Earth Climate Change And Environmental Chemical Pollution Control | |
| DOI | https://doi.org/10.1051/e3sconf/202020602022 | |
| Published online | 11 November 2020 | |
Effect of acetylene content in working gas on microstructure and thermal stability of DLC coating
1 . School of Mechanical and Automotive Engineering, South China University of Technology, 381 Wushan, Guangzhou 510640, China
2 . School of Materials Science and Engineering, South China University of Technology, 381 Wushan, Guangzhou 510640, China
a author email: 13826284105@qq.com Tel. +86 13826284105.
b Corresponding author email: jhpeng@scut.edu.cn Tel. +86 13423634338.
c email: liliejun@ scut.edu.cn
The DLC coatings were deposited onto the surface of 304 stainless steel by using PE-CVD method and Ar+C2H2 as working gas. The effects of the methane content in the working gas on the structure, hardness, thermal stability of the coating were analyzed by means of SEM, FTIR, Raman and nano-indenter. It is found that controlling methane content in the work gas can be used as an effective means to modulate the structure and performance of the DLC coating. With reducing methane content in the gas mixture, the surface sputtering effect by Ar+ is enhanced, which leads a drop of hydrogen content in the coating. A high sp3C-C content in the DLC coating can be obtained by selecting an appropriate methane flow, which derives a combination of high hardness and good thermal stability for the coating. a combination of high hardness and good thermal stability for the coating.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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