Capacitive Flexible Pressure Sensors and Their Application

International School Beijing University of Posts and Telecommunications, Beijing University of Posts and Telecommunications, 100876, Beijing, China

^* Corresponding author: gantiantian@bupt.edu.cn

Abstract

Because of their importance in obtaining information from people and automatic equipment, flexible pressure sensors (FPS) have been widely used in diverse fields such as electronic skin, soft robots, consumer electronics, health monitoring, and human-computer interaction. Among all kinds of soft pressure sensors, capacitance pressure sensor is characterized by its simple construction, low cost, and stable performance. Although this type of pressure sensor is easily made, it is still a hotspot to increase the sensitivity and extend the efficiency of the system. This paper reviews the related research on flexible capacitive pressure sensors, including working mechanism, capacitor structures, methods to improve the performance of capacitive sensors, and applications. Finally, a comparison is made between the efficient approaches for achieving high-sensitivity, and the developing tendency of flexible capacitance sensor is predicted.The purpose of this thesis is to offer some useful information for the study of highly sensitive and highly sensitive materials for manufacturing flexible capacitive sensors.