| Issue |
E3S Web Conf.
Volume 245, 2021
2021 5th International Conference on Advances in Energy, Environment and Chemical Science (AEECS 2021)
|
|
|---|---|---|
| Article Number | 03014 | |
| Number of page(s) | 5 | |
| Section | Chemical Performance Research and Chemical Industry Technology Research and Development | |
| DOI | https://doi.org/10.1051/e3sconf/202124503014 | |
| Published online | 24 March 2021 | |
Design and control of precision work stage with air bearing for large size optical grating fabrication
Mechanical engineering, Beijing University of technology, Chaoyang, Beijing, China
*a Corresponding author:asrgAlashan@163.com
Scanning Beam Interference Lithography (SBIL) is an advanced large-diameter and high-precision plane grating manufacturing solution, which has very high requirements for the positioning accuracy and running speed of the work stage carrying the substrate. In order to improve the size and accuracy of optical grating manufacturing in scanning interference lithography further, air bearing with high precision, high loading capacity and high stiffness is one of the key components for the work stage. In this paper, in order to design a large stroke work stage which meets the demand, firstly, the air bearing, the core part of the work stage, is analyzed and calculated by finite element method, and the pressure distribution curve of the air bearing of the work stage is obtained. On this basis, the linear air bearing with high bearing capacity and high stiffness is designed by using the omni-directional preloading analysis method of high-precision motion platform. Based on the high-precision position feedback of grating encoder, the high-precision closed-loop control of 20nm (3σ) is realized by using PID control and trap filter, which meets the design and requirements, and provides technical and engineering support for the manufacture of large-scale optical grating.
© The Authors, published by EDP Sciences, 2021
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.