E3S Web Conf.
Volume 288, 2021International Symposium “Sustainable Energy and Power Engineering 2021” (SUSE-2021)
|Number of page(s)||4|
|Published online||14 July 2021|
Experimental and theoretical study of the effect of bombardment with Ar+ ions on the spectrum of valence electrons of a Si (111) single crystal
1 Tashkent State Technical University, 100095 Tashkent, Uzbekistan
2 National university of Uzbekistan, 100174 Tashkent, Uzbekistan
3 Head Scientific and Methodological Center, 100095 Tashkent, Uzbekistan
* Corresponding author: email@example.com
The paper studies the effect of disordering of the surface layers on the electronic and optical properties of single-crystal silicon.An analysis of the photoelectron spectra shows that with complete amorphization of the surface density, the condition of Si valence electrons of changes significantly. In particular, the positions of the main maximum of the electrons of the valence band of Si (111) shift by ~ 0.4 eV towards higher binding energies and the band gap Eg increases by 0.1-0.15 eV. The energy of a valence electron in amorphized silicon, which at low impurity concentrations, i.e. at low bombardment doses (D <1015 cm–2), the potential Mkk and, therefore, the shift of the maximum of the density of states vary linearly with respect to concentration. At high impurity concentrations (at doses D> 1015 cm–2), corresponding to the transition to amorphous silicon, the concentration dependence of Mkk is very weak. Therefore, upon amorphization, the peak A of the density of states of the silicon valence band under consideration is shifted to the region of lower electron binding energies. The theoretical substantiation of the obtained experimental results is given.
© The Authors, published by EDP Sciences, 2021
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.