Issue |
E3S Web Conf.
Volume 461, 2023
Rudenko International Conference “Methodological Problems in Reliability Study of Large Energy Systems“ (RSES 2023)
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Article Number | 01065 | |
Number of page(s) | 4 | |
DOI | https://doi.org/10.1051/e3sconf/202346101065 | |
Published online | 12 December 2023 |
Ion sputtering as methods for generation of cluster particles
1 Institute of bioorganic chemistry named after O.S. Sodikov, Academy of Sciences of the Republic of Uzbekistan, 100125, M.Ulugbek Str. 83, Tashkent, Uzbekistan ;
2 Arifov Institute of ion plasma and laser technologies, Academy of Sciences of the Republic of Uzbekistan, 100125, Durmon Yuli Str. 33, Tashkent, Uzbekistan ;
3 Tashkent State Technical University named after Islam Karimov, 100095, Tashkent, University St. 2A Uzbekistan
4 Tashkent Pharmaceutical Institute, 100015, Oybek street, 45, Tashkent, Uzbekistan.
* Corresponding author: Khojiev69@bk.ru.
The investigations of emission and fragmentation of silicon oxide clusters sputtered from Si surface have been performed. It has been shown that the processes of formation of these clusters can be qualitatively described within the framework of modern concepts, and the main channels of their formation are determined in accordance with the mechanism of combinatorial synthesis.
© The Authors, published by EDP Sciences, 2023
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