Open Access
E3S Web Conf.
Volume 73, 2018
The 3rd International Conference on Energy, Environmental and Information System (ICENIS 2018)
Article Number 13019
Number of page(s) 4
Section System Information and Decision Support System
Published online 21 December 2018
  1. J. Chan, 1994. Four-Point-Probes modify by Friedberg, P., 2002, EECS Microfabrication Technology, dalam, diunduh tanggal 12 Maret 2014. [Google Scholar]
  2. A. Kalavagunta, R. A. Weller, 2005. Accurate Geometry Factor Estimation for the Four Point Probe Method using COMSOL Multiphysics, Excerpt from the Proceedings of the COMSOL Multiphysics User’s Conference, Boston. [Google Scholar]
  3. Abdullah, M.H., 1990. Sifat dan kegunaan Semikonduktor, DBP, Selangor. [Google Scholar]
  4. [Google Scholar]
  5. D. H. Petersen, R. Lin, T. M. Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, D. Kjasr, and P. F. Nielsen, 2008. Comparative Study Of Size Dependent Four-Point Probe Sheet Resistance Measurement On Laser Annealed Ultra-Shallow Junctions, J. Vac. Sci. Technol. B 26, 362. [CrossRef] [Google Scholar]

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