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Cited article:

The Process of Ultra Low-Volume Seed Etching by an Experimental Device

Sergey Papusha, Filipp Kozhura, Valeria Zhadko, S. Bratan and S. Roshchupkin
MATEC Web of Conferences 346 03114 (2021)
https://doi.org/10.1051/matecconf/202134603114