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Cited article:

Influence of sputtering deposition parameters on electrical and optical properties of aluminium-doped zinc oxide thin films for photovoltaic applications

Ewelina Krawczak, Zdyb Agata, Slawomir Gulkowski, Alain Fave, Erwann Fourmond

E3S Web Conf., 22 (2017) 00090

Published online: 2017-11-07

DOI: https://doi.org/10.1051/e3sconf/20172200090

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RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication

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