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Experimental and theoretical study of the effect of bombardment with Ar⁺ ions on the spectrum of valence electrons of a Si (111) single crystal

Yokub Ergashov, Boltaxodja Umirzakov, Nebodir Nurmatov and Golib Otamurodov

E3S Web Conf., 288 (2021) 01013

Published online: 14 July 2021

DOI: 10.1051/e3sconf/202128801013

Yokub Ergashov

Boltaxodja Umirzakov

Nebodir Nurmatov

Golib Otamurodov

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