Obtaining higher manganese silicide films with high thermoelectric properties I.R. Bekpulatov, D.S. Shomukhammedova, D.M. Shukurova and B.V. Ibragimova E3S Web of Conf., 365 (2023) 05015 Published online: 30 January 2023 DOI: 10.1051/e3sconf/202336505015