E3S Web of Conferences

Implementation Principles of Optimal Control Technology for the Reduction of Greenhouse Gases in Semiconductor Industry

Yuling Liang, KonTee Tan and Yuanzhe Li

E3S Web Conf., 394 (2023) 01031

Published online: 02 June 2023

DOI: 10.1051/e3sconf/202339401031

Yuling Liang

KonTee Tan

Yuanzhe Li

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