Ion sputtering as methods for generation of cluster particles Sh.T. Khozhiev, S.E. Maksimov, Sh.K. Kuchkanov, B.B. Gaibnazarov, I.A. Yuldoshev, I.O. Kosimov and Sh.Yu. Menglieva E3S Web Conf., 461 (2023) 01065 Published online: 12 December 2023 DOI: 10.1051/e3sconf/202346101065