E3S Web of Conferences

Ion sputtering as methods for generation of cluster particles

Sh.T. Khozhiev, S.E. Maksimov, Sh.K. Kuchkanov, B.B. Gaibnazarov, I.A. Yuldoshev, I.O. Kosimov and Sh.Yu. Menglieva

E3S Web Conf., 461 (2023) 01065

Published online: 12 December 2023

DOI: 10.1051/e3sconf/202346101065

Sh.T. Khozhiev

S.E. Maksimov

Sh.K. Kuchkanov

B.B. Gaibnazarov

I.A. Yuldoshev

I.O. Kosimov

Sh.Yu. Menglieva

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