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Surface morphology analysis of silicon doped with erbium atoms

Sharifa Utamuradova, Jonibek Khamdamov, Jasur Zarifbayev and Kakhramon Fayzullaev

E3S Web of Conf., 508 (2024) 07009

Published online: 05 April 2024

DOI: 10.1051/e3sconf/202450807009

Sharifa Utamuradova

Jonibek Khamdamov

Jasur Zarifbayev

Kakhramon Fayzullaev

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