High Power Self-Aligned, Trench-Implanted 4H-SiC JFETs K. Vamvoukakis, A. Stavrinidis, D. Stefanakis, G. Konstantinidis, M. Kayambaki and K. Zekentes E3S Web Conf., 16 (2017) 12001 Published online: 23 May 2017 DOI: 10.1051/e3sconf/20171612001