| Issue |
E3S Web Conf.
Volume 38, 2018
2018 4th International Conference on Energy Materials and Environment Engineering (ICEMEE 2018)
|
|
|---|---|---|
| Article Number | 02027 | |
| Number of page(s) | 5 | |
| Section | Material Science and Technology | |
| DOI | https://doi.org/10.1051/e3sconf/20183802027 | |
| Published online | 04 June 2018 | |
Tool Efficiency Analysis model research in SEMI industry
Northwestern Polytechnical University Ming De College, Xi’an, China
* Corresponding author. E-mail: 357023814@qq.com
One of the key goals in SEMI industry is to improve equipment through put and ensure equipment production efficiency maximization. This paper is based on SEMI standards in semiconductor equipment control, defines the transaction rules between different tool states，and presents a TEA system model which is to analysis tool performance automatically based on finite state machine. The system was applied to fab tools and verified its effectiveness successfully, and obtained the parameter values used to measure the equipment performance, also including the advices of improvement.
© The Authors, published by EDP Sciences, 2018.
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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