Open Access
E3S Web Conf.
Volume 38, 2018
2018 4th International Conference on Energy Materials and Environment Engineering (ICEMEE 2018)
Article Number 02027
Number of page(s) 5
Section Material Science and Technology
Published online 04 June 2018
  1. SEMI Standards: E10, E79.. [Google Scholar]
  2. Generic Model For Communications and Control Of Manufacturing Equipment(GEM). SEMI E30-1000. [Google Scholar]
  3. Stability analysis of double EWMA run-to-run control with metrology delay. Good R, Qin S J. Proc. of American Control Conference. 2002 [Google Scholar]
  4. “FACTORYworks System Architecture Overview” Version2.5. Brooks Automation.. 2002 [Google Scholar]
  5. 《SEMI Equipment Communication Standard 1 Message Transfer》. Global Information and Control Committee.. 1999 [Google Scholar]
  6. 《High-Speed SECS Message Services (HSMS) Generic Services》. Global Information and Control Committee.. 2002 [Google Scholar]
  7. 《SEMI Equipment Communication Standard 2 Message Content》. Global Information and Control Committee.. 2000 [Google Scholar]
  8. A Drumea C. Popescu “Finite state machines and their applications in software for industrial control[C]”, Electronics Technology: Meeting the Challenges of Electronics Technology Progress 2004. 27th International Spring Seminar on, vol. 1 pp. 25-29 2004. [Google Scholar]
  9. V. Estivill-Castro R. Hexel “Logic labelled finite-state machines and control/status pull technology for model-driven engineering of robotic behaviours”, Proc. 26th InternationalConference on Software & Systems Engineering and their Applications, May 2015. [Google Scholar]
  10. D. Bresolin, K. El-Fakih, T. Villa, N. Yevtushenko, “Deterministic Timed Finite State Machines: Equivalence Checking and Expressive Power”, Proceedings of the 7th InternationalSymposium on Games Automata Logics and Formal Verification, pp. 203-216, 2014. [Google Scholar]

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