| Issue |
E3S Web of Conf.
Volume 402, 2023
International Scientific Siberian Transport Forum - TransSiberia 2023
|
|
|---|---|---|
| Article Number | 14019 | |
| Number of page(s) | 6 | |
| Section | Materials Chemistry and Physics | |
| DOI | https://doi.org/10.1051/e3sconf/202340214019 | |
| Published online | 19 July 2023 | |
Investigation of thermally stimulated conductivity of cobalt silicide
1 National University of Uzbekistan named after Mirzo Ulugbek
2 Tashkent Institute of Chemical Technology, Tashkent
3 Termiz State University, Termiz, Uzbekistan
Mono- and disilicide of cobalt were obtained in the near-surface region of diffusion-doped silicon by cobalt atoms. The thermally stimulated conductivity (TSC) of cobalt disilicide was investigated. The energy of the adhesion levels of 0.32 eV was determined for the structures of cobalt disilicide – doped silicon - cobalt disilicide. The influence of the illumination intensity on the TSC curves is investigated and it is shown that the illumination intensity does not affect the shape of the curve and weakly affects the magnitude of the maximum of the current peak.
© The Authors, published by EDP Sciences, 2023
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